Zeiss Contura G2 CMM
- One in High-Precision 5-Axis Machining Lab
- One in Metrology Lab
- RDS articulating probe head
- Calypso software with “curve”
- 1.8 micron volumetric accuracy
- 27” x 27” x 23” work envelope
RAM Optical Sprint 300
Optical Measuring Machine
- Programmable, non-contacting, visual measurement
- 0.5 micron XYZ axis scales
- 4.3 micron XY accuracy
- 12” x 12” work envelope
Zygo GPI XP
Topographic Laser Interferometer
- Surface figure measurements to λ/20
- 4” aperture with 6” beam-expander
- MetroPro software system
Filmetrics Profilm3D
Optical Surface Profiler
- Measurements of surface roughness and topography
- Sub-nanometer vertical resolution
- Vertical-scanning interferometry (VSI) and phase-shifting interferometry (PSI)
Keyence IM-6225
Image Dimension Measurement
- Automatic recognition of position and origin
- Performs over 100 measurements simultaneously
- Field of view: Ø100 × L200mm
- Repetition: +/-0.5μm
- Accuracy: +/- 2μm
